Under solid (grey), liquid (blue) and vapor states (white) along the equilibrium curves
Calculate a liquid or gas volume or a mass
At boiling point at 1.013 bar
in standard conditions (1,013 bar, 15°C)
Examples of uses of this molecule in Industry and Healthcare
In semiconductor and display manufacturing, sulfur hexafluoride provides fluorine source for high density plasma etching without generating carbon by-products. Sulfur hexafluoride can be used for etching metal silicides, nitrides and oxides versus their metal substrates. It is also used in display fabrication for the cleaning of the Chemical Vapour Deposition (CVD) reactors.Semiconductors
Sulfur hexafluoride is an insulating material used as a dielectric in electrical transformers.
Information to safely use this molecule
Recommendations : Air Liquide has gathered data on the compatibility of gases with materials to assist you in evaluating which materials to use for a gas system. Although the information has been compiled from what Air Liquide believes are reliable sources (International Standards: Compatibility of cylinder and valve materials with gas content; Part 1- Metallic materials: ISO11114-1 (March 2012), Part 2 - Non-metallic materials: ISO11114-2 (April 2013), it must be used with extreme caution and engineering judgement. No raw data such as these can cover all conditions of concentration, temperature, humidity, impurities and aeration. It is therefore recommended that this table is only used to identify possible materials for applications at high pressure and ambient temperature. Extensive investigation and testing under the specific conditions of use need to be carried out to validate a material selection for a given application. Contact the regional Air Liquide team for expertise service.
Sulfur hexafluoride can be prepared from the elements through exposure of sulfur to fluorine. This was also the method used by the discoverers Henri Moissan and Paul Lebeau in 1901.