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Sulfur hexafluoride
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Sulfur hexafluoride
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SF6
Sulfur hexafluoride

Physical Properties

Under solid (grey), liquid (blue) and vapor states (white) along the equilibrium curves

  • General properties
  • Solid phase
  • Liquid Phase
  • Gas Phase
(P)
log(P)
Download
  • Molecular weight
    146.055
    g/mol
  • Content in air
    /

Critical Point

  • Temperature
    45.57
    °C
    114.026 °F 318.72 K
  • Pressure
    37.55
    bar
    3.755E6 pa 544.6165 lbf/in2 37.059 Atm 3755 Kpa 2.8165E4 mmHg
  • Density
    742.297
    kg/m³
    46.34 lb/ft³

Triple Point

  • Temperature
    - 49.6
    °C
    - 57.28 °F 223.55 K
  • Pressure
    2.314
    bar
    2.314E5 pa 33.5617 lbf/in2 2.2837 Atm 231.4 Kpa 1735.6475 mmHg
Pressure 1.013 bar
  • Melting point
    - 50.7
    °C
    - 59.26 °F 222.45 K
  • Latent heat of fusion (at melting point)
    34.399
    kJ/kg
    14.7988 Btu/lb 8.2216 kcal/kg
  • Solid density
    /
Pressure 1.013 bar
  • Liquid density
    /
  • Boiling point (sublimation point)
    - 68.25
    °C
    - 90.85 °F 204.9 K
  • Latent heat of vaporization (at boiling point)
    /
Pressure1.013barTemperature
  • Compressibility factor Z
    9.8491E-1
    9.8733E-1
    9.8867E-1
  • Cp/Cv ratio γ
    1.1074
    1.1017
    1.0984
  • Dynamic viscosity
    1.3771E-4
    Po
    13.771 µPa.s 1.3771E-5 PA.S 9.2537E-6 lb/ft/s
    1.4589E-4
    Po
    14.589 µPa.s 1.4589E-5 PA.S 9.8034E-6 lb/ft/s
    1.5123E-4
    Po
    15.123 µPa.s 1.5123E-5 PA.S 1.0162E-5 lb/ft/s
  • Gas density at boiling point
    /
    /
    /
  • Gas density
    6.6161
    kg/m³
    4.1303E-1 lb/ft³
    6.2563
    kg/m³
    3.9057E-1 lb/ft³
    6.0383
    kg/m³
    3.7696E-1 lb/ft³
  • Heat capacity at constant pressure Cp
    6.2783E-1
    kJ/(kg.K)
    1.5006E-1 BTU/lb∙°F 627.83 J/kg∙K 1.5006E-1 kcal/kg∙K
    6.5296E-1
    kJ/(kg.K)
    1.5606E-1 BTU/lb∙°F 652.96 J/kg∙K 1.5606E-1 kcal/kg∙K
    6.6899E-1
    kJ/(kg.K)
    1.5989E-1 BTU/lb∙°F 668.99 J/kg∙K 1.5989E-1 kcal/kg∙K
  • Heat capacity at constant volume Cv
    5.6695E-1
    kJ/(kg.K)
    1.355E-1 BTU/lb∙°F 566.95 J/kg∙K 1.355E-1 kcal/kg∙K
    5.9271E-1
    kJ/(kg.K)
    1.4166E-1 BTU/lb∙°F 592.71 J/kg∙K 1.4166E-1 kcal/kg∙K
    6.0908E-1
    kJ/(kg.K)
    1.4557E-1 BTU/lb∙°F 609.08 J/kg∙K 1.4557E-1 kcal/kg∙K
  • Liquid (at boiling point)/gas equivalent
    /
    /
    /
  • Solubility in water
    /
    /
    /
  • Specific gravity
    /
    /
    /
  • Specific volume
    1.512E-1
    m³/kg
    2.422 ft³/lb
    1.598E-1
    m³/kg
    2.5597 ft³/lb
    1.656E-1
    m³/kg
    2.6527 ft³/lb
  • Thermal conductivity
    11.627
    mW/m∙K
    6.7224E-3 Btu/ft/h/°F 1.0004E-1 cal/hour∙cm∙°C 2.7789E-5 cal/s∙cm∙°C 1.1627E-2 W/(m∙K)
    12.701
    mW/m∙K
    7.3434E-3 Btu/ft/h/°F 1.0928E-1 cal/hour∙cm∙°C 3.0356E-5 cal/s∙cm∙°C 1.2701E-2 W/(m∙K)
    13.412
    mW/m∙K
    7.7545E-3 Btu/ft/h/°F 1.154E-1 cal/hour∙cm∙°C 3.2055E-5 cal/s∙cm∙°C 1.3412E-2 W/(m∙K)
  • Vapor pressure
    /
    /
    /
SF6
Sulfur hexafluoride

Liquid / Gas Volumes

Calculate a liquid or gas volume or a mass

Liquid Phase

At boiling point at 1.013 bar

m3(Volume)
kg(Mass)

Gas Phase

at 1.013 bar and boiling point

m3(Volume)
kg(Mass)
SF6
Sulfur hexafluoride

Applications

Examples of uses of this molecule in Industry and Healthcare

Semiconductors

In semiconductor and display manufacturing, sulfur hexafluoride provides fluorine source for high density plasma etching without generating carbon by-products. Sulfur hexafluoride can be used for etching metal silicides, nitrides and oxides versus their metal substrates. It is also used in display fabrication for the cleaning of the Chemical Vapour Deposition (CVD) reactors.

Semiconductors

Other

Sulfur hexafluoride is an insulating material used as a dielectric in electrical transformers.

SF6
Sulfur hexafluoride

Safety

Information to safely use this molecule

  • Major hazards
  • Material compatibility
  • GHS02
    Flammable
  • GHS08
    Serious health hazard
  • GHS05
    Corrosive

Threshold of toxicity

  • VME
    1000
    ppm
    or 6000
    mg/m3
  • VLE
    /
  • ILV-8h
    /
  • ILV 15mn
    /
  • TLV-TWA (USA)
    1000
    ppm
    1000 ppm 0.1 vol/% 1.E-3 vol/vol
  • TLV-STEL (USA)
    /

Lethal dose

  • DL50 (intravenously in rabbits)
    5790
    ppm

Odor

none

Metals

  • Aluminium
    Satisfactory
  • Brass
    Satisfactory
  • Monel
    Satisfactory
  • Copper
    Satisfactory
  • Ferritic Steel
    Satisfactory
  • Stainless steel
    Satisfactory
  • Zinc
    no data
  • Titanium
    no data

Plastics

  • Polytetrafluoroethylene
    Satisfactory
  • Polychlorotrifluoroethylene
    Satisfactory
  • Polyvinylidene fluoride
    Satisfactory
  • Polyvinyl chloride
    Satisfactory
  • Ethylene tetrafluoroethylene
    Satisfactory
  • Polycarbonate
    no data
  • Polyamide
    Satisfactory
  • Polypropylene
    Satisfactory

Elastomers

  • Buthyl (isobutene- isoprene) rubber
    Satisfactory
  • Nitrile rubber
    Satisfactory
  • Chloroprene
    Satisfactory
  • Chlorofluorocarbons
    Satisfactory
  • Silicon
    Satisfactory
  • Perfluoroelastomers
    no data
  • Fluoroelastomers
    Satisfactory
  • Nitrile rubber
    Satisfactory
  • Neoprene
    Satisfactory
  • Polyurethane
    Satisfactory
  • Ethylene-Propylene
    Satisfactory

Lubricants

  • Hydrocarbon based lubricant
    Satisfactory
  • Fluorocarbon based lubricant
    Satisfactory

Materials compatibility

Recommendations : Air Liquide has gathered data on the compatibility of gases with materials to assist you in evaluating which materials to use for a gas system. Although the information has been compiled from what Air Liquide believes are reliable sources (International Standards: Compatibility of cylinder and valve materials with gas content; Part 1- Metallic materials: ISO11114-1 (March 2012), Part 2 - Non-metallic materials: ISO11114-2 (April 2013), it must be used with extreme caution and engineering judgement. No raw data such as these can cover all conditions of concentration, temperature, humidity, impurities and aeration. It is therefore recommended that this table is only used to identify possible materials for applications at high pressure and ambient temperature. Extensive investigation and testing under the specific conditions of use need to be carried out to validate a material selection for a given application. Contact the regional Air Liquide team for expertise service.

SF6
Sulfur hexafluoride

Learn More

General information

More information

Sulfur hexafluoride can be prepared from the elements through exposure of sulfur to fluorine. This was also the method used by the discoverers Henri Moissan and Paul Lebeau in 1901.