Under solid (grey), liquid (blue) and vapor states (white) along the equilibrium curves
Calculate a liquid or gas volume or a mass
At boiling point at 1.013 bar
in standard conditions (1,013 bar, 15°C)
Examples of uses of this molecule in Industry and Healthcare
Silane is an active gas for silicon containing layers coating on flat or hollow glass.Glass
Silane is used in semiconductor manufacturing as a source of silicon in polycrystalline silicon deposition for interconnects or masking, growth of epitaxial silicon and the Chemical Vapor Deposition (CVD) of silicon dioxide, silicon nitride, silicon carbide and refractory metal silicides. In display fabrication, it is used to form silicon nitride, silicon oxide and amorphous silicon by Chemical Vapour Deposition (CVD). Silane is an intermediate agent in some proprietary manufacturing processes to purify silicon used to grow ingots for the semiconductor and photovoltaic industries. Silane is used for the manufacturing of amorphous silicon devices for photosensitive drums or solar cells. Silane is used to create a crystalline silicon nitride antireflective coating as well as doped and undoped amorphous and microcrystalline silicon thin films.Semiconductors
Information to safely use this molecule
Recommendations : Air Liquide has gathered data on the compatibility of gases with materials to assist you in evaluating which materials to use for a gas system. Although the information has been compiled from what Air Liquide believes are reliable sources (International Standards: Compatibility of cylinder and valve materials with gas content; Part 1- Metallic materials: ISO11114-1 (March 2012), Part 2 - Non-metallic materials: ISO11114-2 (April 2013), it must be used with extreme caution and engineering judgement. No raw data such as these can cover all conditions of concentration, temperature, humidity, impurities and aeration. It is therefore recommended that this table is only used to identify possible materials for applications at high pressure and ambient temperature. Extensive investigation and testing under the specific conditions of use need to be carried out to validate a material selection for a given application. Contact the regional Air Liquide team for expertise service.
At normal temperature and pressure, silane is a colorless gas. It is a pyrophoric gas, which means that it undergoes spontaneous combustion in air. Above 788°F (420°C/693.15 K), silane breaks down into silicon and hydrogen. In electronics, it is often used as an active gas enabling silicon depositions and for solar panels manufacturing.