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Silane
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Silane
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SiH4
Silane

Physical Properties

Under solid (grey), liquid (blue) and vapor states (white) along the equilibrium curves

  • General properties
  • Solid phase
  • Liquid Phase
  • Gas Phase
(P)
log(P)
Download
  • Molecular weight
    32.117
    g/mol
  • Content in air
    /

Critical Point

  • Temperature
    - 3.45
    °C
    25.79 °F 269.7 K
  • Pressure
    48.4
    bar
    4.84E6 pa 701.9824 lbf/in2 47.7671 Atm 4840 Kpa 3.6303E4 mmHg
  • Density
    234.496
    kg/m³
    14.6391 lb/ft³

Triple Point

  • Temperature
    - 184.67
    °C
    - 300.406 °F 88.48 K
  • Pressure
    1.9644E-4
    bar
    19.6443 pa 2.8492E-3 lbf/in2 1.9387E-4 Atm 1.9644E-2 Kpa 1.4734E-1 mmHg
Pressure 1.013 bar
  • Melting point
    - 184.67
    °C
    - 300.406 °F 88.48 K
  • Latent heat of fusion (at melting point)
    20.777
    kJ/kg
    8.9385 Btu/lb 4.9658 kcal/kg
  • Solid density
    /
Pressure 1.013 bar
  • Liquid density
    582.621
    kg/m³
    36.3718 lb/ft³
  • Boiling point
    - 112.15
    °C
    - 169.87 °F 161 K
  • Latent heat of vaporization (at boiling point)
    377.21
    kJ/kg
    162.2799 Btu/lb 90.1554 kcal/kg
Pressure1.013barTemperature
  • Compressibility factor Z
    /
    /
    /
  • Cp/Cv ratio γ
    /
    /
    /
  • Dynamic viscosity
    1.0704E-4
    Po
    10.7039 µPa.s 1.0704E-5 PA.S 7.1927E-6 lb/ft/s
    1.1241E-4
    Po
    11.2406 µPa.s 1.1241E-5 PA.S 7.5534E-6 lb/ft/s
    1.1597E-4
    Po
    11.5971 µPa.s 1.1597E-5 PA.S 7.7929E-6 lb/ft/s
  • Gas density at boiling point
    /
    /
    /
  • Gas density
    1.443
    kg/m³
    9.0083E-2 lb/ft³
    1.443
    kg/m³
    9.0083E-2 lb/ft³
    1.443
    kg/m³
    9.0083E-2 lb/ft³
  • Heat capacity at constant pressure Cp
    /
    /
    /
  • Heat capacity at constant volume Cv
    /
    /
    /
  • Liquid (at boiling point)/gas equivalent
    403.76
    mol/mol
    431.57
    mol/mol
    431.57
    mol/mol
  • Solubility in water
    /
    /
    /
  • Specific gravity
    1.12
    1.12
    1.12
  • Specific volume
    /
    /
    /
  • Thermal conductivity
    20.345
    mW/m∙K
    1.1763E-2 Btu/ft/h/°F 1.7505E-1 cal/hour∙cm∙°C 4.8626E-5 cal/s∙cm∙°C 2.0345E-2 W/(m∙K)
    21.812
    mW/m∙K
    1.2611E-2 Btu/ft/h/°F 1.8768E-1 cal/hour∙cm∙°C 5.2132E-5 cal/s∙cm∙°C 2.1812E-2 W/(m∙K)
    22.803
    mW/m∙K
    1.3184E-2 Btu/ft/h/°F 1.962E-1 cal/hour∙cm∙°C 5.45E-5 cal/s∙cm∙°C 2.2803E-2 W/(m∙K)
  • Vapor pressure
    /
    /
    /
SiH4
Silane

Liquid / Gas Volumes

Calculate a liquid or gas volume or a mass

Liquid Phase

At boiling point at 1.013 bar

m3(Volume)
kg(Mass)

Gas Phase

at 1.013 bar and boiling point

m3(Volume)
kg(Mass)
SiH4
Silane

Applications

Examples of uses of this molecule in Industry and Healthcare

Glass

Silane is an active gas for silicon containing layers coating on flat or hollow glass.

Glass

Semiconductors

Silane is used in semiconductor manufacturing as a source of silicon in polycrystalline silicon deposition for interconnects or masking, growth of epitaxial silicon and the Chemical Vapor Deposition (CVD) of silicon dioxide, silicon nitride, silicon carbide and refractory metal silicides. In display fabrication, it is used to form silicon nitride, silicon oxide and amorphous silicon by Chemical Vapour Deposition (CVD). Silane is an intermediate agent in some proprietary manufacturing processes to purify silicon used to grow ingots for the semiconductor and photovoltaic industries. Silane is used for the manufacturing of amorphous silicon devices for photosensitive drums or solar cells. Silane is used to create a crystalline silicon nitride antireflective coating as well as doped and undoped amorphous and microcrystalline silicon thin films.

Semiconductors
SiH4
Silane

Safety

Information to safely use this molecule

  • Major hazards
  • Material compatibility
  • GHS02
    Flammable
  • GHS04
    Gas under pressure
  • GHS07
    Health hazards

Autoignition Temperature in Air at Patm and Flammability Limits in Air at Patm and 293.15 K (except if the temperature is indicated)

  • Europe (according to EN1839 for Limits and EN 14522 for autoignition temperature)

    • Auto-ignition temperature
      /
    • Flash point
      /
    • Lower flammability limit
      1.4
      vol/%
      1.4E4 ppm 1.4E4 ppm 1.4E-2 vol/vol
    • Upper flammability limit
      /
  • US (according to NFPA for Limits and ASTM E659 for autoignition temperature)

    • Auto-ignition temperature
      /
    • Flash point
      /
    • Lower flammability limit
      1.4
      vol/%
      1.4E4 ppm 1.4E4 ppm 1.4E-2 vol/vol
    • Upper flammability limit (estimation)
      96
      vol/%
      9.6E5 ppm 9.6E5 ppm 0.96 vol/vol

Threshold of toxicity

  • VME
    5
    ppm
    or 7
    mg/m3
  • VLE
    /
  • ILV-8h
    /
  • ILV 15mn
    /
  • TLV-TWA (USA)
    5
    ppm
    5 ppm 5.E-4 vol/% 5.E-6 vol/vol
  • TLV-STEL (USA)
    /

Odor

Choking

Metals

  • Aluminium
    Satisfactory
  • Brass
    Satisfactory
  • Monel
    Satisfactory
  • Copper
    Satisfactory
  • Ferritic Steel
    Satisfactory
  • Stainless steel
    Satisfactory
  • Zinc
    no data
  • Titanium
    no data

Plastics

  • Polytetrafluoroethylene
    Satisfactory
  • Polychlorotrifluoroethylene
    Satisfactory
  • Polyvinylidene fluoride
    Satisfactory
  • Polyvinyl chloride
    Satisfactory
  • Ethylene tetrafluoroethylene
    Satisfactory
  • Polycarbonate
    no data
  • Polyamide
    no data
  • Polypropylene
    no data

Elastomers

  • Buthyl (isobutene- isoprene) rubber
    Satisfactory
  • Nitrile rubber
    no data
  • Chloroprene
    Satisfactory
  • Chlorofluorocarbons
    Satisfactory
  • Silicon
    no data
  • Perfluoroelastomers
    Satisfactory
  • Fluoroelastomers
    Satisfactory
  • Nitrile rubber
    Satisfactory
  • Neoprene
    Satisfactory
  • Polyurethane
    Satisfactory
  • Ethylene-Propylene
    Satisfactory

Lubricants

  • Hydrocarbon based lubricant
    Not recommended
    contamination of the material
  • Fluorocarbon based lubricant
    Not recommended
    contamination of the material

Materials compatibility

Recommendations : Air Liquide has gathered data on the compatibility of gases with materials to assist you in evaluating which materials to use for a gas system. Although the information has been compiled from what Air Liquide believes are reliable sources (International Standards: Compatibility of cylinder and valve materials with gas content; Part 1- Metallic materials: ISO11114-1 (March 2012), Part 2 - Non-metallic materials: ISO11114-2 (April 2013), it must be used with extreme caution and engineering judgement. No raw data such as these can cover all conditions of concentration, temperature, humidity, impurities and aeration. It is therefore recommended that this table is only used to identify possible materials for applications at high pressure and ambient temperature. Extensive investigation and testing under the specific conditions of use need to be carried out to validate a material selection for a given application. Contact the regional Air Liquide team for expertise service.

SiH4
Silane

Learn More

General information

More information

At normal temperature and pressure, silane is a colorless gas. It is a pyrophoric gas, which means that it undergoes spontaneous combustion in air. Above 788°F (420°C/693.15 K), silane breaks down into silicon and hydrogen. In electronics, it is often used as an active gas enabling silicon depositions and for solar panels manufacturing.