Silane

SiH₄
CAS Number 7803-62-5
UN2203 (gas)

Molecule
Properties
Applications
Safety & Compatibility
Learn More

Click & drag to move the 3D molecule

Liquid / Gas Volumes

Calculate the volume or mass of a quantity of gas or liquid

Liquid Phase

At boiling point at 1.013 bar

m³ (Volume)

kg (Mass)

Gas Phase

In standard conditions (1.013 bar, 15°C)

m³ (Volume)

kg (Mass)

Physical Properties

Download the set of data (XLS - 72.27 KB)

General Properties
Solid Phase
Liquid Phase
Gas Phase

Molecule phase diagram showing the transition phases between solid, liquid and gas as a function of temperature and pressure

Pressure (bar)

- Molar mass 32.117 g/mol
- Content in dry air /
Critical Point
- Temperature -3.45 °C
- Pressure 48.4 bar
- Density 242.03 kg/m³
Triple Point
- Temperature -184.67 °C
- Pressure 1.9644E-4 bar

Pressure 1.013 bar

Latent heat of fusion (at melting point)	20.777 kJ/kg
Melting point	- 184.67 °C

Pressure 1.013 bar

Boiling point	- 112.15 °C
Latent heat of vaporization (at boiling point)	377.21 kJ/kg
Liquid density (at boiling point)	582.621 kg/m³

Pressure 1.013 bar

0 °C
15 °C
25 °C

Compressibility factor Z	9.99E-1
Gas/(liquid at boiling point) equivalent	403.76 vol/vol
Specific gravity	1.12
Thermal conductivity	20.345 mW/(m.K)
Viscosity	1.0704E-4 Po

Compressibility factor Z	9.99E-1
Gas/(liquid at boiling point) equivalent	431.57 vol/vol
Specific gravity	1.12
Thermal conductivity	21.812 mW/(m.K)
Viscosity	1.1241E-4 Po

Compressibility factor Z	9.99E-1
Gas/(liquid at boiling point) equivalent	431.57 vol/vol
Specific gravity	1.12
Thermal conductivity	22.803 mW/(m.K)
Viscosity	1.1597E-4 Po

Applications

Examples of uses of this molecule in Industry and Healthcare

Semiconductors

Silane is used in semiconductor manufacturing for polysilicon and epitaxial silicon deposition, as well as the silicon source for SiO2, Si3N4, by CVD. For display fabrication, Silane is mainly used for the PECVD deposition of Si3N4 and polysilicon films. Silane is used in crystalline silicon photovoltaic cell manufacturing for the deposition of a silicon nitride antireflective layer. Silane is an intermediate for the production of high purity silicon used in photovoltaic cells and semiconductors.

Glass

Silane is an active gas for silicon containing layers coating on flat or hollow glass.

Safety & Compatibility

Major Hazards
Material Compatibility

GHS02

Flammable

GHS04

Gas under pressure

GHS07

Health hazards

Autoignition Temperature, Flammability Limits & Flash Point

Europe (according to EN1839 for Limits and EN 14522 for autoignition temperature)

Autoignition temperature (Chemsafe)	Autoignitable
Lower flammability limit (IEC 80079-20-1)	1.4 vol%

US (according to ASTM E681 for Limits and ASTM E659 for autoignition temperature)

Autoignition temperature (NFPA 325)	Pyrophoric
Lower flammability limit (NFPA 325)	1.4 vol%
Upper flammability limit (NFPA 325)	96 (est.)

Threshold of toxicity

VLEP 8h France (at Patm and 293.15 K)

7 mg/m³ or 5 ppm

Odor

Choking

Metals

Aluminium	Satisfactory
Brass	Satisfactory
Monel	No data
Copper	No data
Ferritic Steel	Satisfactory
Stainless steel	Some alloys are sensitive to hydrogen embrittlement Acceptable
Zinc	No data
Titanium	No data

Plastics

Polytetrafluoroethylene	Satisfactory
Polychlorotrifluoroethylene	Satisfactory
Polyvinylidene fluoride	Satisfactory
Polyvinyl chloride	No data
Ethylene tetrafluoroethylene	No data
Polycarbonate	No data
Polyamide	No data
Polypropylene	No data

Elastomers

Butyl (isobutene- isoprene) rubber	No data
Nitrile rubber	No data
Chloroprene	No data
Chlorofluorocarbons	No data
Silicone	No data
Perfluoroelastomers	No data
Fluoroelastomers	No data
Neoprene	No data
Polyurethane	Satisfactory
Ethylene-Propylene	Satisfactory

Lubricants

Hydrocarbon based lubricant	Contamination of the material Not recommended
Fluorocarbon based lubricant	Contamination of the material Not recommended

Materials compatibility

Recommendations : Air Liquide has gathered data on the compatibility of gases with materials to assist you in evaluating which materials to use for a gas system. Although the information has been compiled from what Air Liquide believes are reliable sources (International Standards: Compatibility of cylinder and valve materials with gas content; Part 1- Metallic materials: ISO11114-1 (March 2012), Part 2 - Non-metallic materials: ISO11114-2 (April 2013), it must be used with extreme caution and engineering judgement. No raw data such as these can cover all conditions of concentration, temperature, humidity, impurities and aeration. It is therefore recommended that this table is only used to identify possible materials for applications at high pressure and ambient temperature. Extensive investigation and testing under the specific conditions of use need to be carried out to validate a material selection for a given application. Contact the regional Air Liquide team for expertise service.

Learn More

More information

At normal temperature and pressure, silane is a colorless gas. It is a pyrophoric gas, which means that it undergoes spontaneous combustion in air. Above 788°F (420°C/693.15 K), silane breaks down into silicon and hydrogen. In electronics, it is often used as an active gas enabling silicon depositions and for solar panels manufacturing.