Nitrogen trifluoride
- NF3
- CAS Number 7783-54-2
- UN2451 (gas)
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Liquid / Gas Volumes
Calculate a liquid or gas volume or a mass
Liquid Phase
At boiling point at 1.013 bar
Gas Phase
In standard conditions (1,013 bar, 15°C)
Physical Properties
Molecule phase diagram showing the transition phases between solid, liquid and gas as a function of temperature and pressure
-
- Molecular weight 71.019 g/mol
- Content in dry air /
-
Critical Point
- Temperature -39.15 °C
- Pressure 44.607 bar
- Density 597.91 kg/m³
-
Triple Point
- Temperature -206.69 °C
- Pressure 1.854E-6 bar
Pressure 1.013 bar
| Latent heat of fusion (at melting point) | 5.603 kJ/kg |
| Melting point | - 206.69 °C |
Pressure 1.013 bar
| Boiling point | - 129.01 °C |
| Latent heat of vaporization (at boiling point) | 162.708 kJ/kg |
| Liquid density (at boiling point) | 1537.863 kg/m3 |
| Compressibility factor Z | 9.9515E-1 |
| Cp/Cv ratio γ | 1.1996 |
| Gas density (at boiling point) | 6.239 kg/m3 |
| Gas density | 3.184 kg/m3 |
| Gas/(liquid at boiling point) equivalent | 488.486 vol/vol |
| Heat capacity Cp | 7.1941E-1 kJ/(kg.K) |
| Heat capacity Cv | 5.9972E-1 kJ/(kg.K) |
| Specific gravity | 2.46 |
| Specific volume | 3.141E-1 m3/kg |
| Thermal conductivity | 16.023 mW/(m.K) |
| Viscosity | 1.8123E-4 Po |
| Compressibility factor Z | 9.9594E-1 |
| Cp/Cv ratio γ | 1.1921 |
| Gas density | 3.0158 kg/m3 |
| Gas/(liquid at boiling point) equivalent | 515.72 vol/vol |
| Heat capacity Cp | 7.4054E-1 kJ/(kg.K) |
| Heat capacity Cv | 6.2121E-1 kJ/(kg.K) |
| Specific gravity | 2.46 |
| Specific volume | 3.316E-1 m3/kg |
| Thermal conductivity | 17.195 mW/(m.K) |
| Viscosity | 1.902E-4 Po |
| Compressibility factor Z | 9.9639E-1 |
| Cp/Cv ratio γ | 1.1876 |
| Gas density | 2.9134 kg/m3 |
| Gas/(liquid at boiling point) equivalent | 533.85 vol/vol |
| Heat capacity Cp | 7.5425E-1 kJ/(kg.K) |
| Heat capacity Cv | 6.3511E-1 kJ/(kg.K) |
| Specific gravity | 2.46 |
| Specific volume | 3.432E-1 m3/kg |
| Thermal conductivity | 17.979 mW/(m.K) |
| Viscosity | 1.961E-4 Po |
Applications
Examples of uses of this molecule in Industry and Healthcare
Electronic components
In silicon thin film photovoltaic, semiconductor and display fabrication, nitrogen trifluoride is used as a fluorine source to clean Chemical Vapor Deposition (CVD) reactors. It is also a selective reagent for silicon dioxide etching.
Safety & Compatibility
GHS03
Oxidising
GHS04
Gas under pressure
GHS07
Health hazards
Threshold of toxicity
| PEL USA OSHA (vol) | 10 ppm |
| VLEP 8h France (at Patm and 293.15 K) | 30 mg/m3 or 10 ppm |
Odor
Moldy
Metals
| Aluminium | Acceptable |
| Brass | Acceptable |
| Monel | No data |
| Copper | No data |
| Ferritic Steel | Acceptable |
| Stainless steel | Acceptable |
| Zinc | No data |
| Titanium | No data |
Plastics
| Polytetrafluoroethylene | Acceptable |
| Polychlorotrifluoroethylene | Acceptable |
| Polyvinylidene fluoride | Acceptable |
| Polyvinyl chloride |
Risk of explosion and fire
Not recommended
|
| Ethylene tetrafluoroethylene | No data |
| Polycarbonate | No data |
| Polyamide |
Risk of explosion and fire
Not recommended
|
| Polypropylene |
Risk of explosion and fire
Not recommended
|
Elastomers
| Buthyl (isobutene- isoprene) rubber |
Risk of explosion and fire
Not recommended
|
| Nitrile rubber NBR |
Risk of explosion and fire
Not recommended
|
| Chloroprene |
Risk of explosion and fire
Not recommended
|
| Chlorofluorocarbons | No data |
| Silicone | No data |
| Perfluoroelastomers | Acceptable |
| Fluoroelastomers | Acceptable |
| Neoprene | No data |
| Polyurethane |
Risk of explosion and fire
Not recommended
|
| Ethylene-Propylene |
risk of explosion and fire
Not recommended
|
Lubricants
| Hydrocarbon based lubricant |
Risk of explosion and fire
Not recommended
|
| Fluorocarbon based lubricant | Acceptable |
Materials compatibility
Recommendations : Air Liquide has gathered data on the compatibility of gases with materials to assist you in evaluating which materials to use for a gas system. Although the information has been compiled from what Air Liquide believes are reliable sources (International Standards: Compatibility of cylinder and valve materials with gas content; Part 1- Metallic materials: ISO11114-1 (March 2012), Part 2 - Non-metallic materials: ISO11114-2 (April 2013), it must be used with extreme caution and engineering judgement. No raw data such as these can cover all conditions of concentration, temperature, humidity, impurities and aeration. It is therefore recommended that this table is only used to identify possible materials for applications at high pressure and ambient temperature. Extensive investigation and testing under the specific conditions of use need to be carried out to validate a material selection for a given application. Contact the regional Air Liquide team for expertise service.
Learn More
More information
After first attempting the synthesis in 1903, Otto Ruff obtained nitrogen trifluoride by the electrolysis of a molten mixture of ammonium fluoride