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      Nitrogen trifluoride
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      Nitrogen trifluoride
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      NF3
      Nitrogen trifluoride

      Physical Properties

      Under solid (grey), liquid (blue) and vapor states (white) along the equilibrium curves

      • General properties
      • Solid phase
      • Liquid Phase
      • Gas Phase
      (P)
      log(P)
      Download
      • Molecular weight
        71.019
        g/mol
      • Content in air
        /

      Critical Point

      • Temperature
        - 39.15
        °C
         - 38.47 °F 234 K
      • Pressure
        44.607
        bar
         4.4607E6 pa 646.9696 lbf/in2 44.0237 Atm 4460.7 Kpa 3.3458E4 mmHg
      • Density
        562.47
        kg/m³
         35.1138 lb/ft³

      Triple Point

      • Temperature
        - 206.69
        °C
         - 340.042 °F 66.46 K
      • Pressure
        1.854E-6
        bar
         1.854E-1 pa 2.689E-5 lbf/in2 1.8298E-6 Atm 1.854E-4 Kpa 1.3906E-3 mmHg
      Pressure 1.013 bar
      • Melting point
        - 206.69
        °C
         - 340.042 °F 66.46 K
      • Latent heat of fusion (at melting point)
        5.603
        kJ/kg
         2.4105 Btu/lb 1.3391 kcal/kg
      • Solid density
        /
      Pressure 1.013 bar
      • Liquid density
        1537.863
        kg/m³
         96.0054 lb/ft³
      • Boiling point
        - 129.01
        °C
         - 200.218 °F 144.14 K
      • Latent heat of vaporization (at boiling point)
        162.708
        kJ/kg
         69.9988 Btu/lb 38.8881 kcal/kg
      Pressure1.013barTemperature
      • Compressibility factor Z
        9.9515E-1
        9.9594E-1
        9.9639E-1
      • Cp/Cv ratio γ
        1.1996
        1.1921
        1.1876
      • Dynamic viscosity
        1.8123E-4
        Po
         18.123 µPa.s 1.8123E-5 PA.S 1.2178E-5 lb/ft/s
        1.902E-4
        Po
         19.02 µPa.s 1.902E-5 PA.S 1.2781E-5 lb/ft/s
        1.961E-4
        Po
         19.61 µPa.s 1.961E-5 PA.S 1.3177E-5 lb/ft/s
      • Gas density at boiling point
        6.24
        kg/m³
         3.8955E-1 lb/ft³
        6.24
        kg/m³
         3.8955E-1 lb/ft³
        6.24
        kg/m³
         3.8955E-1 lb/ft³
      • Gas density
        3.184
        kg/m³
         1.9877E-1 lb/ft³
        3.0158
        kg/m³
         1.8827E-1 lb/ft³
        2.9134
        kg/m³
         1.8188E-1 lb/ft³
      • Heat capacity at constant pressure Cp
        7.1941E-1
        kJ/(kg.K)
         1.7194E-1 BTU/lb∙°F 719.41 J/kg∙K 1.7194E-1 kcal/kg∙K
        7.4054E-1
        kJ/(kg.K)
         1.7699E-1 BTU/lb∙°F 740.54 J/kg∙K 1.7699E-1 kcal/kg∙K
        7.5425E-1
        kJ/(kg.K)
         1.8027E-1 BTU/lb∙°F 754.25 J/kg∙K 1.8027E-1 kcal/kg∙K
      • Heat capacity at constant volume Cv
        5.9972E-1
        kJ/(kg.K)
         1.4334E-1 BTU/lb∙°F 599.72 J/kg∙K 1.4334E-1 kcal/kg∙K
        6.2121E-1
        kJ/(kg.K)
         1.4847E-1 BTU/lb∙°F 621.21 J/kg∙K 1.4847E-1 kcal/kg∙K
        6.3511E-1
        kJ/(kg.K)
         1.518E-1 BTU/lb∙°F 635.11 J/kg∙K 1.518E-1 kcal/kg∙K
      • Liquid (at boiling point)/gas equivalent
        483.13
        mol/mol
        510.07
        mol/mol
        528
        mol/mol
      • Solubility in water
        /
        /
        /
      • Specific gravity
        2.46
        2.46
        2.46
      • Specific volume
        3.141E-1
        m³/kg
         5.0314 ft³/lb
        3.316E-1
        m³/kg
         5.3117 ft³/lb
        3.432E-1
        m³/kg
         5.4975 ft³/lb
      • Thermal conductivity
        16.023
        mW/m∙K
         9.2641E-3 Btu/ft/h/°F 1.3787E-1 cal/hour∙cm∙°C 3.8296E-5 cal/s∙cm∙°C 1.6023E-2 W/(m∙K)
        17.195
        mW/m∙K
         9.9417E-3 Btu/ft/h/°F 1.4795E-1 cal/hour∙cm∙°C 4.1097E-5 cal/s∙cm∙°C 1.7195E-2 W/(m∙K)
        17.979
        mW/m∙K
         1.0395E-2 Btu/ft/h/°F 1.547E-1 cal/hour∙cm∙°C 4.2971E-5 cal/s∙cm∙°C 1.7979E-2 W/(m∙K)
      • Vapor pressure
        /
        /
        /
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      NF3
      Nitrogen trifluoride

      Liquid / Gas Volumes

      Calculate a liquid or gas volume or a mass

      Liquid Phase

      At boiling point at 1.013 bar

      m3(Volume)
      kg(Mass)

      Gas Phase

      at 1.013 bar and boiling point

      m3(Volume)
      kg(Mass)
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      NF3
      Nitrogen trifluoride

      Applications

      Examples of uses of this molecule in Industry and Healthcare

      Electronic components

      In silicon thin film photovoltaic, semiconductor and display fabrication, nitrogen trifluoride is used as a fluorine source to clean Chemical Vapor Deposition (CVD) reactors. It is also a selective reagent for silicon dioxide etching.

      Electronic components
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      NF3
      Nitrogen trifluoride

      Safety

      Information to safely use this molecule

      • Major hazards
      • Material compatibility
      Safety
      • GHS03
        Comburant
      • GHS04
        Gas under pressure
      • GHS07
        Health hazards

      Threshold of toxicity

      • VME
        10
        ppm
         or 30
        mg/m3
      • VLE
        /
      • ILV-8h
        /
      • ILV 15mn
        /
      • TLV-TWA (USA)
        10
        ppm
         10 ppm 1.E-3 vol/% 1.E-5 vol/vol
      • TLV-STEL (USA)
        /

      Lethal concentration

      • CL50 (in rats. 4h)
        3350
        ppm
         3350 ppm 3.35E-1 vol/% 3.35E-3 vol/vol

      Odor

      Moldy

      Metals

      • Aluminium
        Satisfactory
      • Brass
        Satisfactory
      • Monel
        no data
      • Copper
        no data
      • Ferritic Steel
        Satisfactory
      • Stainless steel
        Satisfactory
      • Zinc
        no data
      • Titanium
        no data

      Plastics

      • Polytetrafluoroethylene
        Satisfactory
      • Polychlorotrifluoroethylene
        Satisfactory
      • Polyvinylidene fluoride
        Satisfactory
      • Polyvinyl chloride
        no data
      • Ethylene tetrafluoroethylene
        no data
      • Polycarbonate
        no data
      • Polyamide
        no data
      • Polypropylene
        no data

      Elastomers

      • Buthyl (isobutene- isoprene) rubber
        no data
      • Nitrile rubber
        no data
      • Chloroprene
        no data
      • Chlorofluorocarbons
        no data
      • Silicon
        no data
      • Perfluoroelastomers
        no data
      • Fluoroelastomers
        no data
      • Nitrile rubber
        no data
      • Neoprene
        no data
      • Polyurethane
        no data
      • Ethylene-Propylene
        no data

      Lubricants

      • Hydrocarbon based lubricant
        Not recommended
        significant loss of mass
      • Fluorocarbon based lubricant
        Satisfactory

      Materials compatibility

      Recommendations : Air Liquide has gathered data on the compatibility of gases with materials to assist you in evaluating which materials to use for a gas system. Although the information has been compiled from what Air Liquide believes are reliable sources (International Standards: Compatibility of cylinder and valve materials with gas content; Part 1- Metallic materials: ISO11114-1 (March 2012), Part 2 - Non-metallic materials: ISO11114-2 (April 2013), it must be used with extreme caution and engineering judgement. No raw data such as these can cover all conditions of concentration, temperature, humidity, impurities and aeration. It is therefore recommended that this table is only used to identify possible materials for applications at high pressure and ambient temperature. Extensive investigation and testing under the specific conditions of use need to be carried out to validate a material selection for a given application. Contact the regional Air Liquide team for expertise service.

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      NF3
      Nitrogen trifluoride

      Learn More

      General information

      More information

      After first attempting the synthesis in 1903, Otto Ruff obtained nitrogen trifluoride by the electrolysis of a molten mixture of ammonium fluoride

      NF3

      Nitrogen trifluoride