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Nitrogen trifluoride
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Nitrogen trifluoride
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NF3
Nitrogen trifluoride

Physical Properties

Under solid (grey), liquid (blue) and vapor states (white) along the equilibrium curves

  • General properties
  • Solid phase
  • Liquid Phase
  • Gas Phase
(P)
log(P)
Download
  • Molecular weight
    71.019
    g/mol
  • Content in air
    /

Critical Point

  • Temperature
    - 39.15
    °C
    - 38.47 °F 234 K
  • Pressure
    44.607
    bar
    4.4607E6 pa 646.9696 lbf/in2 44.0237 Atm 4460.7 Kpa 3.3458E4 mmHg
  • Density
    562.47
    kg/m³
    35.1138 lb/ft³

Triple Point

  • Temperature
    - 206.69
    °C
    - 340.042 °F 66.46 K
  • Pressure
    1.854E-6
    bar
    1.854E-1 pa 2.689E-5 lbf/in2 1.8298E-6 Atm 1.854E-4 Kpa 1.3906E-3 mmHg
Pressure 1.013 bar
  • Melting point
    - 206.69
    °C
    - 340.042 °F 66.46 K
  • Latent heat of fusion (at melting point)
    5.603
    kJ/kg
    2.4105 Btu/lb 1.3391 kcal/kg
  • Solid density
    /
Pressure 1.013 bar
  • Liquid density
    1537.863
    kg/m³
    96.0054 lb/ft³
  • Boiling point
    - 129.01
    °C
    - 200.218 °F 144.14 K
  • Latent heat of vaporization (at boiling point)
    162.708
    kJ/kg
    69.9988 Btu/lb 38.8881 kcal/kg
Pressure1.013barTemperature
  • Compressibility factor Z
    9.9515E-1
    9.9594E-1
    9.9639E-1
  • Cp/Cv ratio γ
    1.1996
    1.1921
    1.1876
  • Dynamic viscosity
    1.8123E-4
    Po
    18.123 µPa.s 1.8123E-5 PA.S 1.2178E-5 lb/ft/s
    1.902E-4
    Po
    19.02 µPa.s 1.902E-5 PA.S 1.2781E-5 lb/ft/s
    1.961E-4
    Po
    19.61 µPa.s 1.961E-5 PA.S 1.3177E-5 lb/ft/s
  • Gas density at boiling point
    6.24
    kg/m³
    3.8955E-1 lb/ft³
    6.24
    kg/m³
    3.8955E-1 lb/ft³
    6.24
    kg/m³
    3.8955E-1 lb/ft³
  • Gas density
    3.184
    kg/m³
    1.9877E-1 lb/ft³
    3.0158
    kg/m³
    1.8827E-1 lb/ft³
    2.9134
    kg/m³
    1.8188E-1 lb/ft³
  • Heat capacity at constant pressure Cp
    7.1941E-1
    kJ/(kg.K)
    1.7194E-1 BTU/lb∙°F 719.41 J/kg∙K 1.7194E-1 kcal/kg∙K
    7.4054E-1
    kJ/(kg.K)
    1.7699E-1 BTU/lb∙°F 740.54 J/kg∙K 1.7699E-1 kcal/kg∙K
    7.5425E-1
    kJ/(kg.K)
    1.8027E-1 BTU/lb∙°F 754.25 J/kg∙K 1.8027E-1 kcal/kg∙K
  • Heat capacity at constant volume Cv
    5.9972E-1
    kJ/(kg.K)
    1.4334E-1 BTU/lb∙°F 599.72 J/kg∙K 1.4334E-1 kcal/kg∙K
    6.2121E-1
    kJ/(kg.K)
    1.4847E-1 BTU/lb∙°F 621.21 J/kg∙K 1.4847E-1 kcal/kg∙K
    6.3511E-1
    kJ/(kg.K)
    1.518E-1 BTU/lb∙°F 635.11 J/kg∙K 1.518E-1 kcal/kg∙K
  • Liquid (at boiling point)/gas equivalent
    483.13
    mol/mol
    510.07
    mol/mol
    528
    mol/mol
  • Solubility in water
    /
    /
    /
  • Specific gravity
    2.46
    2.46
    2.46
  • Specific volume
    3.141E-1
    m³/kg
    5.0314 ft³/lb
    3.316E-1
    m³/kg
    5.3117 ft³/lb
    3.432E-1
    m³/kg
    5.4975 ft³/lb
  • Thermal conductivity
    16.023
    mW/m∙K
    9.2641E-3 Btu/ft/h/°F 1.3787E-1 cal/hour∙cm∙°C 3.8296E-5 cal/s∙cm∙°C 1.6023E-2 W/(m∙K)
    17.195
    mW/m∙K
    9.9417E-3 Btu/ft/h/°F 1.4795E-1 cal/hour∙cm∙°C 4.1097E-5 cal/s∙cm∙°C 1.7195E-2 W/(m∙K)
    17.979
    mW/m∙K
    1.0395E-2 Btu/ft/h/°F 1.547E-1 cal/hour∙cm∙°C 4.2971E-5 cal/s∙cm∙°C 1.7979E-2 W/(m∙K)
  • Vapor pressure
    /
    /
    /
NF3
Nitrogen trifluoride

Liquid / Gas Volumes

Calculate a liquid or gas volume or a mass

Liquid Phase

At boiling point at 1.013 bar

m3(Volume)
kg(Mass)

Gas Phase

at 1.013 bar and boiling point

m3(Volume)
kg(Mass)
NF3
Nitrogen trifluoride

Applications

Examples of uses of this molecule in Industry and Healthcare

Electronic components

In silicon thin film photovoltaic, semiconductor and display fabrication, nitrogen trifluoride is used as a fluorine source to clean Chemical Vapor Deposition (CVD) reactors. It is also a selective reagent for silicon dioxide etching.

Electronic components
NF3
Nitrogen trifluoride

Safety

Information to safely use this molecule

  • Major hazards
  • Material compatibility
  • GHS03
    Comburant
  • GHS04
    Gas under pressure
  • GHS07
    Health hazards

Threshold of toxicity

  • VME
    10
    ppm
    or 30
    mg/m3
  • VLE
    /
  • ILV-8h
    /
  • ILV 15mn
    /
  • TLV-TWA (USA)
    10
    ppm
    10 ppm 1.E-3 vol/% 1.E-5 vol/vol
  • TLV-STEL (USA)
    /

Lethal concentration

  • CL50 (in rats. 4h)
    3350
    ppm
    3350 ppm 3.35E-1 vol/% 3.35E-3 vol/vol

Odor

Moldy

Metals

  • Aluminium
    Satisfactory
  • Brass
    Satisfactory
  • Monel
    no data
  • Copper
    no data
  • Ferritic Steel
    Satisfactory
  • Stainless steel
    Satisfactory
  • Zinc
    no data
  • Titanium
    no data

Plastics

  • Polytetrafluoroethylene
    Satisfactory
  • Polychlorotrifluoroethylene
    Satisfactory
  • Polyvinylidene fluoride
    Satisfactory
  • Polyvinyl chloride
    no data
  • Ethylene tetrafluoroethylene
    no data
  • Polycarbonate
    no data
  • Polyamide
    no data
  • Polypropylene
    no data

Elastomers

  • Buthyl (isobutene- isoprene) rubber
    no data
  • Nitrile rubber
    no data
  • Chloroprene
    no data
  • Chlorofluorocarbons
    no data
  • Silicon
    no data
  • Perfluoroelastomers
    no data
  • Fluoroelastomers
    no data
  • Nitrile rubber
    no data
  • Neoprene
    no data
  • Polyurethane
    no data
  • Ethylene-Propylene
    no data

Lubricants

  • Hydrocarbon based lubricant
    Not recommended
    significant loss of mass
  • Fluorocarbon based lubricant
    Satisfactory

Materials compatibility

Recommendations : Air Liquide has gathered data on the compatibility of gases with materials to assist you in evaluating which materials to use for a gas system. Although the information has been compiled from what Air Liquide believes are reliable sources (International Standards: Compatibility of cylinder and valve materials with gas content; Part 1- Metallic materials: ISO11114-1 (March 2012), Part 2 - Non-metallic materials: ISO11114-2 (April 2013), it must be used with extreme caution and engineering judgement. No raw data such as these can cover all conditions of concentration, temperature, humidity, impurities and aeration. It is therefore recommended that this table is only used to identify possible materials for applications at high pressure and ambient temperature. Extensive investigation and testing under the specific conditions of use need to be carried out to validate a material selection for a given application. Contact the regional Air Liquide team for expertise service.

NF3
Nitrogen trifluoride

Learn More

General information

More information

After first attempting the synthesis in 1903, Otto Ruff obtained nitrogen trifluoride by the electrolysis of a molten mixture of ammonium fluoride