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Gas Encyclopaedia

This application enables data on many gas molecules to be accessed rapidly.
You can search on a raw chemical formula, chemical name or UN transportation code. The values displayed on this page are extracted from the literature and the proprietary current AIR LIQUIDE Group data.

Gas selection



Boron trifluoride
BF3
Boron trifluoride
CAS Number : 7637-07-2
UN1008


;Boron fluoride; Trifluoroborane; Trifluoroboron;
 
Main applications
  • Industries
    Applications

  • Boron trifluoride is largely used in semiconductor manufacturing. Boron atom is an p-type dopant for epitaxial silicon.
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Gas Properties
Molecular Weight
  • Molecular weight  : 67.8 g/mol
Solid phase
  • Melting point  : -126 °C
Liquid phase
  • Liquid density (1.013 bar at boiling point) : 1589 kg/m3
  • Boiling point (1.013 bar) : -100.3 °C
  • Latent heat of vaporization (1.013 bar at boiling point) : 278.39 kJ/kg
Critical point
  • Critical temperature  : -12.3 °C
  • Critical pressure  : 49.85 bar
Gaseous phase
  • Gas density (1.013 bar and 15 °C (59 °F)) : 2.84 kg/m3
  • Compressibility Factor (Z) (1.013 bar and 15 °C (59 °F)) : 0.9951
  • Specific gravity (air = 1) (1.013 bar and 21 °C (70 °F)) : 2.37
  • Specific volume (1.013 bar and 21 °C (70 °F)) : 0.35 m3/kg
  • Heat capacity at constant pressure (Cp) (1.013 bar and 30 °C (86 °F)) : 0.05 kJ/(mol.K)
  • Viscosity (1.013 bar and 0 °C (32 °F)) : 0.000156 Poise
  • Thermal conductivity (1.013 bar and 0 °C (32 °F)) : 17.28 mW/(m.K)
Miscellaneous
  • Solubility in water (1.013 bar and 0 °C (32 °F)) : 1057 vol/vol
Go back to choosing the units
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Vapor Pressure Graph
Vapor Pressure Graph
The vapor pressure curve may be obtained by clicking on the image. On the graph, pressure is in bar or 0.1 MPa, temperature in K or °C. The critical point is indicated by a black spot on the liquid-vapor equilibrium curve.





Safety Data Sheets
The European Material Safety Data Sheets (MSDS) are made available for information only. Visitors to this site may only use them at their own risk. The MSDSs were prepared by EIGA ( the European Industrial Gas Association) according to European Union standards. Although Air Liquide believes the information in the MSDSs to be correct, Air Liquide cannot be held responsible in any event if the contents do not meet the regulatory requirements of countries outside the European Union. Material Safety Data Sheets are subject to revision. Refer to this web site to ensure that you have the latest version.

 

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Major Hazards
  • Major hazard : Inhalation and Bodily Contact
  • Toxicity (Am. Conf. Of Gov. Ind. Hygienists ACGIH 2000 Edition) : Ceiling of 1 ppm
  • Flammability limits in air (STP conditions) : Non-flammable
  • Odour : Pungent, Suffocating
  • UN Number : UN1008
  • EINECS Number : 231-569-5
  • DOT Label (USA) : NFG & P
  • DOT Hazard class (USA) : Non flammable Gas
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Material compatibility
Air Liquide has assembled data on the compatibility of gases with materials to assist you in evaluating which products to use for a gas system. Although the information has been compiled from what Air Liquide believes are reliable sources (International Standards: Compatibility of cylinder and valve materials with gas content; Part 1: ISO 11114-1 (Jul 1998), Part 2: ISO 11114-2 (Mar 2001)), it must be used with extreme caution. No raw data such as this can cover all conditions of concentration, temperature, humidity, impurities and aeration. It is therefore recommended that this table is used to choose possible materials and then more extensive investigation and testing is carried out under the specific conditions of use. The collected data mainly concern high pressure applications at ambiant temperature and the safety aspect of material compatibity rather than the quality aspect.
Material
Compatibility
Metals
General Behavior : In the case of moisture, see HF resistance.
  • Aluminium
    Non recommended
  • Brass
    Non recommended
  • Copper
    Non recommended
  • Ferritic Steels (e.g. Carbon steels)
    Satisfactory but corrosive in presence of moisture.
  • Stainless Steel
    Satisfactory but corrosive in presence of moisture.
Plastics
  • Polytetrafluoroethylene (PTFE)
    Satisfactory
  • Polychlorotrifluoroethylene (PCTFE)
    Satisfactory
  • Vinylidene polyfluoride (PVDF) (KYNAR)
    Satisfactory
  • Polyamide (PA) (NYLON)
    Non recommended, significant loss of mass by extraction or chemical reaction.
  • Polypropylene (PP)
    Satisfactory
Elastomers
  • Buthyl (isobutene - isoprene) rubber (IIR)
    Non recommended
  • Nitrile rubber (NBR)
    Non recommended, significant loss of mass by extraction or chemical reaction.
  • Chloroprene (CR)
    Non recommended, significant loss of mass by extraction or chemical reaction.
  • Chlorofluorocarbons (FKM) (VITON)
    Satisfactory
  • Silicon (Q)
    Non recommended, significant loss of mass by extraction or chemical reaction.
  • Ethylene - Propylene (EPDM)
    Non recommended, significant loss of mass by extraction or chemical reaction.
Lubricants
  • Hydrocarbon based lubricant
    Non recommended, significant loss of mass by extraction or chemical reaction.
  • Fluorocarbon based lubricant
    Satisfactory
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Selection of the units
You can choose the units in which the values are displayed. By default, SI units are selected.

 

  • Quantity
    Units

 

  • Mass
    kg lb g
  • Volume
    m3 ft3 l
  • Pressure
    bar psi kPa
  • Temperature
    °C °F K °R
  • Density
    kg/m3 lb/ft3 mol/l (lb-mol)/ft3
  • Enthalpy
    kJ/kg Btu/lb kJ/mol kcal/kg kcal/mol Btu/lb-mol
  • Heat Capacity
    kJ/(mol.K) Btu/(lb.°F) kJ/(kg.K) Btu/(lb-mol.°F) kcal/(kg.K)
    cal/(mol.K) J/(mol.K)
  • Viscosity
    Poise lb/(ft.s) µPa.s Pa.s
  • Thermal Conductivity
    mW/(m.K) Btu.ft/(h.ft2.°F) cal.cm/(h.cm2.°C) W/(m.K)
    (cal.cm)/(s.cm2.°C)
  • Concentration
    vol % vol ppm vol/vol
  • Solubility
    vol/vol lb/ft3 (lb-mol)/ft3 mol/l g/l
  • Specific volume
    m3/kg ft3/lb l/mol ft3/lb-mol

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